beam currents of 1-20 nA, beam energies of 10-30 keV). 10s - 100s nm for EBSD, 100s nm - 5 μm for EDS), and the optimum analytical conditions are also similar (i.e. The spatial resolution of the 2 techniques are broadly similar (i.e. The ideal geometry, with the EDS detector mounted above the EBSD detector, is shown in the image on the right. On most SEMs the 2 detectors can be mounted on the same side of the chamber, so that simultaneous X-ray measurement and EBSD pattern collection is possible. In many ways EBSD and EDS are perfect partners in the scanning electron microscope (SEM). ![]() However, the combination of chemical data from energy dispersive X-ray spectrometry (EDS) and crystallographic data from EBSD can be very powerful, both for identifying unknown phases in a sample (phase ID), correlating chemical and crystallographic variations in a microstructure or for more effective differentiation between phases that have similar crystallography. In most cases EBSD can effectively differentiate between phases based on their crystallographic differences.
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